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SUSS MicroTec Solutions GmbH & Co. KG

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SUSS MicroTec

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SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit

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SUSS MicroTec Solutions GmbH & Co. KG
Schleissheimer-Str. 90, 85748 Garching, Germany
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